
Available Thermal Oxide Thickness
Ranges Available Diameters
Available Films and Thickness Ranges Available Diameters PETEOS: LPCVD Si. Nitride PLASMA Nitride Blanket Photoresist Coating
Available Diameters
1,000A - 5,000A
5,001A - 1.0um
1.01um - 1.5um
1.51um - 2.0um
2.01um - 2.5um
2.51um - 3.0um50mm, 75mm, 100mm, 125mm, 150mm, 200mm,
and 300mm
Polysilicon:
1,000A - 5,000A
5,001A - 10KA
10,001A - 20KA
500A - 10KA
10,001A - 20KA
20,001A - 30KA
500A - 3,000A
1,000A - 10KA
I-Line Positive Resist Spin and Hard Bake
1.0um - 3.0um100mm, 125mm, 150mm, 200mm, and 300mm
Metal Sputtering Ranges
Available Metals
200A - 500A
501A - 1,500A
1,501A - 3,000A
3,001A - 5,000A
5,001A - 8,000A
8,000A - 12KATa
TaN
Ti
TiN
TiW
W
WN
Cu
Al
Al-Cu (1%)
Al-Si (1%)100mm, 125mm, 150mm, 200mm, and 300mm