THERMAL OXIDE

Available Thermal Oxide Thickness Ranges

Available Diameters

1,000A - 5,000A
5,001A - 1.0um
1.01um - 1.5um
1.51um - 2.0um
2.01um - 2.5um
2.51um - 3.0um
50mm, 75mm, 100mm, 125mm, 150mm, 200mm, and 300mm
 

 

THIN FILMS

Available Films and Thickness Ranges

Available Diameters

Polysilicon:
1,000A - 5,000A
5,001A - 10KA
10,001A - 20KA

PETEOS:
500A - 10KA
10,001A - 20KA
20,001A - 30KA

LPCVD Si. Nitride
500A - 3,000A

PLASMA Nitride
1,000A - 10KA

Blanket Photoresist Coating
I-Line Positive Resist Spin and Hard Bake
1.0um - 3.0um

100mm, 125mm, 150mm, 200mm, and 300mm
 

 

METALS-REFRACTORY/CONDUCTIVE
Metal Sputtering Ranges Available Metals

Available Diameters

200A - 500A
501A - 1,500A
1,501A - 3,000A
3,001A - 5,000A
5,001A - 8,000A
8,000A - 12KA
Ta
TaN
Ti
TiN
TiW
W
WN
Cu
Al
Al-Cu (1%)
Al-Si (1%)
100mm, 125mm, 150mm, 200mm, and 300mm
 

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